Title:
【発明の名称】有磁場マイクロ波処理装置
Document Type and Number:
Japanese Patent JP2769560
Kind Code:
B2
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Inventors:
Naoki Hirose
Shinya Tsunono
Kenji Ito
Toru Takayama
Sanpei Yamazaki
Shinya Tsunono
Kenji Ito
Toru Takayama
Sanpei Yamazaki
Application Number:
JP15290989A
Publication Date:
June 25, 1998
Filing Date:
June 15, 1989
Export Citation:
Assignee:
Semiconductor Energy Laboratory Co., Ltd.
International Classes:
C23C16/50; C23C16/26; C23C16/27; C23C16/511; C23F4/00; H01L21/302; H01L21/3065; (IPC1-7): C23C16/50; C23C16/26; C23F4/00; H01L21/3065
Domestic Patent References:
| JP62243774A | ||||
| JP60134423A |