Title:
【発明の名称】プラズマCVD装置
Document Type and Number:
Japanese Patent JP2781757
Kind Code:
B2
Inventors:
Ogawa Tadahiro
Application Number:
JP28294595A
Publication Date:
July 30, 1998
Filing Date:
October 31, 1995
Export Citation:
Assignee:
Yamagata NEC Corporation
International Classes:
C23C16/46; C23C16/50; H01L21/205; (IPC1-7): C23C16/50; C23C16/46; H01L21/205
Attorney, Agent or Firm:
Naoki Kyomoto (2 outside)