Title:
【発明の名称】揺動式ポリッシング装置
Document Type and Number:
Japanese Patent JP2782404
Kind Code:
B2
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Inventors:
Koichi Tanaka
Hiromasa Hashimoto
Yasuo Inada
Nakajima Makoto
Hiromasa Hashimoto
Yasuo Inada
Nakajima Makoto
Application Number:
JP35011692A
Publication Date:
July 30, 1998
Filing Date:
December 04, 1992
Export Citation:
Assignee:
Shin-Etsu Semiconductor Co., Ltd.
Fujikoshi Machine Industry Co., Ltd.
Fujikoshi Machine Industry Co., Ltd.
International Classes:
B24B37/07; B24B37/10; H01L21/304; (IPC1-7): B24B37/04
Domestic Patent References:
| JP4210369A | ||||
| JP5077994A |
Attorney, Agent or Firm:
Akimoto Teruo