Title:
【発明の名称】超音波洗浄の評価方法およびその装置
Document Type and Number:
Japanese Patent JP2791257
Kind Code:
B2
Inventors:
SAKURAI NAOAKI
Application Number:
JP1162193A
Publication Date:
August 27, 1998
Filing Date:
January 27, 1993
Export Citation:
Assignee:
TOSHIBA KK
International Classes:
B06B1/06; B08B3/12; (IPC1-7): B06B1/06; B08B3/12
Domestic Patent References:
| JP1262000A |
Attorney, Agent or Firm:
Takehiko Suzue