Title:
【発明の名称】イオン源
Document Type and Number:
Japanese Patent JP2801096
Kind Code:
B2
Inventors:
Yasuo Yamashita
Application Number:
JP29420391A
Publication Date:
September 21, 1998
Filing Date:
November 11, 1991
Export Citation:
Assignee:
Japan Steel Works, Ltd.
International Classes:
H01J27/18; H01J37/08; H01L21/302; H01L21/3065; H05H1/22; H05H1/46; H05H7/08; (IPC1-7): H01J27/18; H01J37/08; H01L21/3065; H05H1/46
Attorney, Agent or Firm:
Soga Doteru (6 people outside)