Title:
【発明の名称】露光装置
Document Type and Number:
Japanese Patent JP2808152
Kind Code:
B2
Inventors:
OOTA HIROHISA
MORI MAKIKO
OZAWA KUNITAKA
UZAWA SHUNICHI
NOSE TETSUSHI
MORI MAKIKO
OZAWA KUNITAKA
UZAWA SHUNICHI
NOSE TETSUSHI
Application Number:
JP32586789A
Publication Date:
October 08, 1998
Filing Date:
December 18, 1989
Export Citation:
Assignee:
KYANON KK
International Classes:
G03F9/00; H01L21/027; H01L21/30; (IPC1-7): H01L21/027; G03F9/00
Domestic Patent References:
| JP58103136A | ||||
| JP59107515A | ||||
| JP6197915A | ||||
| JP59132125A | ||||
| JP62279629A |
Attorney, Agent or Firm:
Tetsuya Ito (1 outside)