Title:
【発明の名称】処理装置
Document Type and Number:
Japanese Patent JP2811248
Kind Code:
B2
Inventors:
Kimura Yoshio
Application Number:
JP35119391A
Publication Date:
October 15, 1998
Filing Date:
December 13, 1991
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/027; H01L21/30; (IPC1-7): H01L21/027
Domestic Patent References:
| JP60198818A | ||||
| JP6318627A | ||||
| JP1165117A | ||||
| JP2265237A | ||||
| JP511436U |
Attorney, Agent or Firm:
Kikuhiko Nakamoto