Title:
【発明の名称】超精密チャック
Document Type and Number:
Japanese Patent JP2826107
Kind Code:
B2
Inventors:
KUROKI YOSHIHITO
SAWAGUCHI TATSUE
SAWAGUCHI TATSUE
Application Number:
JP31689687A
Publication Date:
November 18, 1998
Filing Date:
December 15, 1987
Export Citation:
Assignee:
KITAGAWA TETSUKOSHO KK
International Classes:
B23B31/177; B23B31/10; B23B31/16; (IPC1-7): B23B31/177; B23B31/10
Domestic Patent References:
| JP62213906A | ||||
| JP57101139U | ||||
| JP54129871U | ||||
| JP61199327U |
Attorney, Agent or Firm:
Shunsuke Nakao (1 person outside)