Title:
【発明の名称】ポジ型感光性樹脂組成物
Document Type and Number:
Japanese Patent JP2828736
Kind Code:
B2
Inventors:
BANBA TOSHIO
TAKEUCHI ETSU
TAKEDA NAOJI
TAKEDA TOSHIRO
TOKO AKIRA
TAKEUCHI ETSU
TAKEDA NAOJI
TAKEDA TOSHIRO
TOKO AKIRA
Application Number:
JP13711190A
Publication Date:
November 25, 1998
Filing Date:
May 29, 1990
Export Citation:
Assignee:
SUMITOMO BEEKURAITO KK
International Classes:
G03F7/023; C08G73/22; G03F7/022; G03F7/075; H01L21/027; H01L21/30; (IPC1-7): G03F7/023; C08G73/22; G03F7/075; H01L21/027
Domestic Patent References:
| JP646947A | ||||
| JP6396162A | ||||
| JP5627140A | ||||
| JP6313032A | ||||
| JP3115461A | ||||
| JP320743A |