Title:
【発明の名称】半導体加速度センサ
Document Type and Number:
Japanese Patent JP2833257
Kind Code:
B2
Inventors:
SASAKI OSAMU
Application Number:
JP9184591A
Publication Date:
December 09, 1998
Filing Date:
April 23, 1991
Export Citation:
Assignee:
FUJI DENKI KK
International Classes:
G01P15/12; G01P15/125; G01P15/18; H01L29/84; (IPC1-7): G01P15/12; G01P15/125; H01L29/84
Domestic Patent References:
| JP1253657A | ||||
| JP228973A | ||||
| JP2309259A |
Attorney, Agent or Firm:
Shoji Shinobe