Title:
【発明の名称】真空差圧シール装置
Document Type and Number:
Japanese Patent JP2835194
Kind Code:
B2
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Inventors:
MAEDA MORIO
Application Number:
JP2198391A
Publication Date:
December 14, 1998
Filing Date:
February 15, 1991
Export Citation:
Assignee:
SUMITOMO JUKIKAI KOGYO KK
International Classes:
C23C14/56; (IPC1-7): C23C14/56
Attorney, Agent or Firm:
Toshi Hisamon