Title:
【発明の名称】ゲート電極の形成方法
Document Type and Number:
Japanese Patent JP2837036
Kind Code:
B2
Inventors:
KAWAMURA HIROSHI
Application Number:
JP20543892A
Publication Date:
December 14, 1998
Filing Date:
July 31, 1992
Export Citation:
Assignee:
SHAAPU KK
International Classes:
H01L23/522; H01L21/338; H01L21/768; H01L29/778; H01L29/812; (IPC1-7): H01L21/768
Attorney, Agent or Firm:
Shintaro Nogawa