Title:
【発明の名称】シリコンの精製方法
Document Type and Number:
Japanese Patent JP2846408
Kind Code:
B2
Inventors:
ARAYA MATAO
BABA HIROYUKI
YUSHIMO KENKICHI
BABA HIROYUKI
YUSHIMO KENKICHI
Application Number:
JP13826790A
Publication Date:
January 13, 1999
Filing Date:
May 30, 1990
Export Citation:
Assignee:
KAWASAKI SEITETSU KK
NIPPON ITA GARASU KK
NIPPON ITA GARASU KK
International Classes:
C01B33/037; H01L31/04; (IPC1-7): C01B33/037
Attorney, Agent or Firm:
Yoshio Kosugi