Title:
【発明の名称】超伝導スイッチ素子
Document Type and Number:
Japanese Patent JP2849721
Kind Code:
B2
Abstract:
PURPOSE:To obtain an element whose power consumption is small and whose response speed is high, by forming superconducting thin films so as to sandwich a nonmagnetic metal, forming an electrode thereon, forming further an insulating film, and forming superconducting lead wires for applying magnetic field on the insulating film. CONSTITUTION:The basic constitution of the title element is composed of the following, a substrate 1, a junction part 2 formed of a nonmagnetic metal thin film, superconducting thin films 3 separated by the junction part 2, and superconducting lead wires 4 for applying magnetic field. In addition, electrodes 5 and an insulating film 6 are formed. The superconducting film 3 is formed by using one of superconductors such as Y1Ba2Cu3Ox, Ln1Ba2Cu3Ox whose critical temperatures are higher than 77K. The metal thin film used for the junction part 2 is formed by using one of Nb, Zn, Al, Cu-Al, etc. The nonmagnetic metal thin film 2, the SiO2 thin film 6, and the superconducting lead wires 4 for applying magnetic field are desirable to be manufactured by using vapor-deposition method. The two superconducting lead wires 4 for applying magnetic field are fixed almost above the junction part 2 so as to be parallel with each other. The junction part 2 and the lead wires 4 are manufactured by using photolithography method.
Inventors:
YUZURIHARA HAJIME
OOTA WASABURO
OOTA WASABURO
Application Number:
JP19624489A
Publication Date:
January 27, 1999
Filing Date:
July 28, 1989
Export Citation:
Assignee:
RIKOO KK
International Classes:
H01L39/22; (IPC1-7): H01L39/22
Domestic Patent References:
| JP62216279A | ||||
| JP6428877A | ||||
| JP1293674A |
Attorney, Agent or Firm:
Toshiaki Ikeura (1 outside)