Title:
【発明の名称】静電容量式圧力センサ
Document Type and Number:
Japanese Patent JP2852593
Kind Code:
B2
Inventors:
ISHIKURA YOSHUKI
KIMURA SHIGEO
KIHARA TAKASHI
KIMURA SHIGEO
KIHARA TAKASHI
Application Number:
JP7646493A
Publication Date:
February 03, 1999
Filing Date:
March 11, 1993
Export Citation:
Assignee:
YAMATAKE KK
International Classes:
G01L9/12; H01L29/84; (IPC1-7): G01L9/12; H01L29/84
Domestic Patent References:
| JP59163514A | ||||
| JP62259475A |
Attorney, Agent or Firm:
Masaki Yamakawa