Title:
【発明の名称】基板搬送装置
Document Type and Number:
Japanese Patent JP2859118
Kind Code:
B2
Inventors:
SATO SEIYA
TSUJI MASAO
MIZOHATA YASUHIRO
TSUJI MASAO
MIZOHATA YASUHIRO
Application Number:
JP34515593A
Publication Date:
February 17, 1999
Filing Date:
December 20, 1993
Export Citation:
Assignee:
DAINIPPON SUKURIIN SEIZO KK
International Classes:
B65G49/07; G11B7/26; H01L21/027; H01L21/677; H01L21/68; (IPC1-7): H01L21/68; B65G49/07
Domestic Patent References:
| JP529438A | ||||
| JP1173940U |
Attorney, Agent or Firm:
Tsutomu Sugitani