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Title:
【発明の名称】SOI基板の品質評価方法
Document Type and Number:
Japanese Patent JP2864834
Kind Code:
B2
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Inventors:
YOSHINO AKIRA
Application Number:
JP606092A
Publication Date:
March 08, 1999
Filing Date:
January 17, 1992
Export Citation:
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Assignee:
NIPPON DENKI KK
International Classes:
H01L21/20; H01L21/02; H01L21/66; H01L21/76; H01L21/762; H01L27/12; (IPC1-7): H01L21/66; H01L21/20; H01L27/12
Domestic Patent References:
JP60154446A
JP61270659A
JP63220536A
Attorney, Agent or Firm:
Naoki Kyomoto (2 outside)



 
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