Title:
【発明の名称】静電チャック
Document Type and Number:
Japanese Patent JP2865472
Kind Code:
B2
Abstract:
An improvement is proposed in an electrostatic chuck having a chuck head comprising an electrode layer sandwiched between a backing insulating layer and a frontal insulating layer, which comes into contact with a work piece when the electrostatic chuck is working, by which the electrostatic chuck can exhibit a large electrostatic attractive force by increasing the voltage applied between the electrodes without the problem of dielectric breakdown in the insulating layer and a leak current occurring on the surface of the work piece. The improvement can be obtained by forming the frontal insulating layer in a two-layered structure consisting of a high-dielectric layer made from a material having a dielectric constant of at least 50 at a temperature of 20 DEG C. and a frequency of 1 MHz and a high-resistivity layer made from a material having a volume resistivity of at least 1x1012 ohm.cm at 20 DEG C., the high-dielectric layer being interposed between the electrode layer and the high-resistivity layer.
Inventors:
KUBOTA YOSHIHIRO
KAWAI MAKOTO
KOJIMA SHINJI
KAWAI MAKOTO
KOJIMA SHINJI
Application Number:
JP7016292A
Publication Date:
March 08, 1999
Filing Date:
February 20, 1992
Export Citation:
Assignee:
SHINETSU KAGAKU KOGYO KK
International Classes:
B25J15/06; B23Q3/154; B25B11/00; H01L21/683; H02N13/00; (IPC1-7): H01L21/68; H02N13/00
Domestic Patent References:
| JP61260949A |
Attorney, Agent or Firm:
Ryoichi Yamamoto (1 person outside)