Title:
【発明の名称】薄膜トランジスタ装置
Document Type and Number:
Japanese Patent JP2867136
Kind Code:
B2
Inventors:
OKA HIDEAKI
Application Number:
JP23964587A
Publication Date:
March 08, 1999
Filing Date:
September 24, 1987
Export Citation:
Assignee:
SEIKOO EPUSON KK
International Classes:
H01L27/12; H01L21/336; H01L29/78; H01L29/786; (IPC1-7): H01L29/786; H01L21/336
Domestic Patent References:
| JP60164363A | ||||
| JP6058675A | ||||
| JP58143375A | ||||
| JP6263466A |
Attorney, Agent or Firm:
Kisaburo Suzuki (1 outside)