【発明の名称】光導波路の微小凹部加工方法およびその加工装置

Title:

【発明の名称】光導波路の微小凹部加工方法およびその加工装置

Document Type and Number:

Japanese Patent JP2871444

Kind Code:

B2

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Inventors:

SATO SHIRO
TANIGUCHI SATOSHI
IKEDA MITSUAKI
NISHIZAWA KOICHI

Application Number:

JP3404394A

Publication Date:

March 17, 1999

Filing Date:

March 04, 1994

Export Citation:

Assignee:

NIPPON ITA GARASU KK

International Classes:

G02B6/30; G02B6/13; (IPC1-7): G02B6/13; G02B6/30

Attorney, Agent or Firm:

Ohno Seiichi

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