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Title:
【発明の名称】圧電振動子とその製造方法
Document Type and Number:
Japanese Patent JP2878302
Kind Code:
B2
Abstract:
PURPOSE:To obtain a piezoelectric vibrator which is lessened in number of component parts, cost, and size and improved in performance by a method wherein a region of the vibrator is formed into a porous structure or a region of the porous vibrator is made different from the other region in porosity, and the regions are made to have different resonant frequencies respectively. CONSTITUTION:A molding die 4 composed of an outer cylinder 5 and a boundary cylinder 6 which serves as a partitioning is used to form a burned body 1. For instance, only lead zirconate titanate is filled into the inside 2a of the boundary cylinder 6, An intermediate section 3a between the outer cylinder 2 and the boundary cylinder 6 is filled with lead zirconate titanate mixed with methacryl powder. The boundary cylinder 6 is removed from the molding die 4, and the die 4 is pressed to obtain a molded body. The molded body is kept heated by an electric oven. Then, methacryl powder dissipates by evaporation. The molded body is furthermore burned, whereby a lead zirconate titanate sintered body 1, which is composed of an inner pillar part 2 of a dense lead zirconate titanate sintered body and an outer cylinder part 3 of a porous lead zirconate titanate structure of porosity of 30%, can be obtained. Furthermore, the sintered body 1 is abraded and then subjected to a known polarization treatment.

Inventors:
MIZUMURA KOICHI
OOBA SHINJI
KURIHARA YOSHIAKI
Application Number:
JP9151789A
Publication Date:
April 05, 1999
Filing Date:
April 11, 1989
Export Citation:
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Assignee:
NIPPON MUSEN KK
International Classes:
H04R17/00; H01L41/09; H01L41/22; H01L41/45; (IPC1-7): H01L41/09; H01L41/22; H04R17/00
Domestic Patent References:
JP251908A
Attorney, Agent or Firm:
Yoshio Komiya