Title:
【発明の名称】ICパッケージ検査装置及びICパッケージ検査方法
Document Type and Number:
Japanese Patent JP2887683
Kind Code:
B2
Inventors:
FUJII KEIICHI
MORIKAWA ITSUKI
NAGASAKI MASATO
MORIKAWA ITSUKI
NAGASAKI MASATO
Application Number:
JP32209089A
Publication Date:
April 26, 1999
Filing Date:
December 12, 1989
Export Citation:
Assignee:
NIPPON TOKUSHU TOGYO KK
International Classes:
H01L21/66; G01N21/88; G01N21/956; (IPC1-7): H01L21/66; G01N21/88
Domestic Patent References:
| JP63124945A | ||||
| JP1195350A | ||||
| JP63118884A |
Attorney, Agent or Firm:
Seiichi Wakahara