Title:
【発明の名称】小型化四極子アレイ
Document Type and Number:
Japanese Patent JP2888984
Kind Code:
B2
Abstract:
A residual gas sensor, suitable for mounting within an low pressure chamber, includes an array of quadrupoles formed from a plurality of parallel rods mounted in a cantilevered fashion in a glass seal. Sixteen parallel rods form an array of nine quadrupoles with adjacent quadrupoles sharing adjacent rods. A filament emitting electrons ionize gas molecules present in the low pressure chamber. These ions enter channels in the center of each quadrupole and are accelerated towards a collector having a surface mounted within each channel of each quadrupole. Voltages are applied to the rods thereby creating an identical electric field within the channels of each quadrupoles of the array. By varying the voltages applied to the rods, the electric field within the channels can be tuned to permit only ions having a specific mass-to-charge ratio to make contact with the collector. By analyzing the current generated by the ions making contact with the collector at different voltages, the presence and quantity of gases present in the low pressure chamber can be determined.
More Like This:
Inventors:
FUERAN ROBAATO JEI
Application Number:
JP50188495A
Publication Date:
May 10, 1999
Filing Date:
May 27, 1994
Export Citation:
Assignee:
FUERAN SAIENTEIFUITSUKU
International Classes:
G01N27/62; H01J49/14; H01J49/26; H01J49/42; (IPC1-7): H01J49/26
Domestic Patent References:
| JP629356U |
Attorney, Agent or Firm:
Atsushi Nakajima (3 outside)