Title:
【発明の名称】半導体素子のAl電極パッド構造
Document Type and Number:
Japanese Patent JP2891427
Kind Code:
B2
Inventors:
KOGASHIWA TOSHINORI
Application Number:
JP2497990A
Publication Date:
May 17, 1999
Filing Date:
February 02, 1990
Export Citation:
Assignee:
TANAKA DENSHI KOGYO KK
International Classes:
H01L23/52; H01L21/3205; H01L21/321; H01L21/60; (IPC1-7): H01L21/60
Domestic Patent References:
| JP1151248A | ||||
| JP137039A |
Attorney, Agent or Firm:
Hayakawa Masaname