Title:
【発明の名称】有機溶媒再生装置
Document Type and Number:
Japanese Patent JP2894573
Kind Code:
B2
Inventors:
HONDA ZENJIRO
MIHARA KAZUO
NIIMURA YOSHIAKI
YAMAMOTO MASASHI
SAKURAI TOSHIHIKO
SHIRAI HIDEKI
MIHARA KAZUO
NIIMURA YOSHIAKI
YAMAMOTO MASASHI
SAKURAI TOSHIHIKO
SHIRAI HIDEKI
Application Number:
JP29792390A
Publication Date:
May 24, 1999
Filing Date:
November 02, 1990
Export Citation:
Assignee:
DAISERU KAGAKU KOGYO KK
HITACHI SEISAKUSHO KK
HEKISUTO JAPAN KK
HITACHI SEISAKUSHO KK
HEKISUTO JAPAN KK
International Classes:
B01D61/36; B01D12/00; H01L21/304; (IPC1-7): B01D61/36; H01L21/304
Domestic Patent References:
| JP62133091A | ||||
| JP3115081U |
Attorney, Agent or Firm:
Kaoru Furuya (3 outside)