Title:
【発明の名称】ダイアフラム型赤外線センサの赤外線吸収膜製造方法
Document Type and Number:
Japanese Patent JP2901556
Kind Code:
B2
Inventors:
WADA HIDEO
NAGASHIMA MITSUHIRO
SASAKI NARIHITO
NAGASHIMA MITSUHIRO
SASAKI NARIHITO
Application Number:
JP28677896A
Publication Date:
June 07, 1999
Filing Date:
October 29, 1996
Export Citation:
Assignee:
BOEICHO GIJUTSU KENKYU HONBUCHO
NIPPON DENKI KK
NIPPON DENKI KK
International Classes:
G01J1/02; C23C14/06; C23C14/34; G01J5/20; H01L21/203; H01L27/14; (IPC1-7): C23C14/34; C23C14/06; G01J1/02; G01J5/20; H01L21/203; H01L27/14
Domestic Patent References:
| JP244046A | ||||
| JP492656U | ||||
| JP4109537U |
Attorney, Agent or Firm:
Ikeda Noriho