Title:
【発明の名称】処理装置
Document Type and Number:
Japanese Patent JP2906783
Kind Code:
B2
Inventors:
OOMORI TSUTAE
Application Number:
JP30245191A
Publication Date:
June 21, 1999
Filing Date:
October 22, 1991
Export Citation:
Assignee:
TOKYO EREKUTORON KK
International Classes:
B05C11/08; H01L21/027; H01L21/30; (IPC1-7): H01L21/027; B05C11/08
Domestic Patent References:
| JP1135565A | ||||
| JP621474A | ||||
| JP58103132A | ||||
| JP57121227A | ||||
| JP544936A | ||||
| JP4341367A |
Attorney, Agent or Firm:
Akihiro Asai