Title:
【発明の名称】プローブカード
Document Type and Number:
Japanese Patent JP2918164
Kind Code:
B2
Abstract:
PURPOSE:To suppress the degree of mismatching of impedance small by shortening the lengths of probes which becomes the cause of mismatching of impedance. CONSTITUTION:For probes 17 and 18, the columnar parts 17a and 18a are inserted and fixed in through holes 19 and 20 in the width direction of a substrate 11, and are welded and connected electrically with wiring patterns 14 and 15. Hereby, nearly rhombic parts 17b and 18b are fixed at both ends of columnar parts 17a and 18a and tip parts 17d and 18d, and the probes 17 and 18 can obtain necessary and enough elastic force even if the line diameters (d) are small at several hundreds mum or thereabout, respectively. And the length l2 of the probes 17 and 18 will do with the length below half the length of a conventional probe card. Through L component that each probe 17 and 18 has becomes the cause of mismatching of impedance, the lengths of the probes 17 and 18 are short at about 10mm or less, so the degree of mismatching of impedance is smaller than that in the former case.
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Inventors:
ABE KATSUJI
Application Number:
JP356489A
Publication Date:
July 12, 1999
Filing Date:
January 10, 1989
Export Citation:
Assignee:
FUJITSU KK
International Classes:
G01R1/067; G01R31/28; H01L21/66; H01R11/12; G01R31/26; (IPC1-7): H01L21/66; G01R1/067; G01R31/26; G01R31/28; H01R11/12
Domestic Patent References:
| JP5613742A | ||||
| JP63252437A |
Attorney, Agent or Firm:
Tadahiko Ito