Title:
【発明の名称】ポリゴンスキャナミラーの面倒れ測定パターンの形成方法
Document Type and Number:
Japanese Patent JP2922580
Kind Code:
B2
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Inventors:
SAIKI KATSUSHI
Application Number:
JP12518390A
Publication Date:
July 26, 1999
Filing Date:
May 14, 1990
Export Citation:
Assignee:
MITA KOGYO KK
International Classes:
G01M11/00; G02B26/10; G02B26/12; G03G15/04; (IPC1-7): G02B26/10; G01M11/00
Attorney, Agent or Firm:
Hirokatsu Kamei (2 outside)