Title:
【発明の名称】半導体基板収納容器
Document Type and Number:
Japanese Patent JP2949724
Kind Code:
B2
More Like This:
Inventors:
KARITA YUTAKA
Application Number:
JP17924889A
Publication Date:
September 20, 1999
Filing Date:
July 11, 1989
Export Citation:
Assignee:
NIPPON DENKI KK
International Classes:
H01L21/673; B65D85/86; H01L21/68; (IPC1-7): H01L21/68; B65D85/86
Domestic Patent References:
| JP61203383A | ||||
| JP61171251U |
Attorney, Agent or Firm:
Naoki Kyomoto