Title:
【発明の名称】位置合わせ装置及び位置合わせ方法
Document Type and Number:
Japanese Patent JP2966384
Kind Code:
B2
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Inventors:
SAIKI KAZUYOSHI
Application Number:
JP33804297A
Publication Date:
October 25, 1999
Filing Date:
November 20, 1997
Export Citation:
Assignee:
TOKYO EREKUTORON KK
International Classes:
H01L21/302; H01L21/3065; H01L21/677; H01L21/68; (IPC1-7): H01L21/68
Attorney, Agent or Firm:
Kamei Miaki (1 person outside)