Title:
【発明の名称】水蒸気供給方法及び水蒸気供給装置
Document Type and Number:
Japanese Patent JP2972313
Kind Code:
B2
Inventors:
FUJIMURA SHUZO
MYANAGA TAKESHI
TAKEUCHI TATSUYA
NAKANO YOSHIMASA
MATOBA TADATSUGI
MYANAGA TAKESHI
TAKEUCHI TATSUYA
NAKANO YOSHIMASA
MATOBA TADATSUGI
Application Number:
JP26798690A
Publication Date:
November 08, 1999
Filing Date:
October 05, 1990
Export Citation:
Assignee:
FUJITSU KK
SHINKO SEIKI KK
SHINKO SEIKI KK
International Classes:
C23C16/44; C23F4/00; H01L21/31; (IPC1-7): C23C16/44; C23F4/00; H01L21/31
Domestic Patent References:
| JP1294868A |
Attorney, Agent or Firm:
Ariga Gunichiro