Title:
【発明の名称】真空処理装置
Document Type and Number:
Japanese Patent JP2972315
Kind Code:
B2
Inventors:
KOBAYASHI HIDE
OKAMOTO AKIRA
SHIMAMURA HIDEAKI
YONEOKA JUJI
OKAMOTO AKIRA
SHIMAMURA HIDEAKI
YONEOKA JUJI
Application Number:
JP27896690A
Publication Date:
November 08, 1999
Filing Date:
October 19, 1990
Export Citation:
Assignee:
HITACHI SEISAKUSHO KK
International Classes:
G01J5/00; H01L21/31; H01L21/66; H01L33/34; (IPC1-7): H01L21/66; G01J5/00; H01L21/31; H01L33/00
Domestic Patent References:
| JP6379339A | ||||
| JP63188940A | ||||
| JP1105530A | ||||
| JP442025A | ||||
| JP4130746A | ||||
| JP456145A |
Attorney, Agent or Firm:
Yasuo Sakuta (1 outside)