Title:
【発明の名称】ウェハ移し替え装置
Document Type and Number:
Japanese Patent JP2977153
Kind Code:
B2
Inventors:
OOISHI TETSUSHI
Application Number:
JP14686697A
Publication Date:
November 10, 1999
Filing Date:
June 04, 1997
Export Citation:
Assignee:
SHIMADA RIKA KOGYO KK
International Classes:
H01L21/677; H01L21/68; (IPC1-7): H01L21/68
Domestic Patent References:
| JP6045031A | ||||
| JP1295435A | ||||
| JP1319968A |
Attorney, Agent or Firm:
Hagiwara Makoto