Title:
【発明の名称】パターン形成用感光性樹脂組成物及びパターン形成方法
Document Type and Number:
Japanese Patent JP2982113
Kind Code:
B2
Inventors:
KYOHARA TADASHI
TARUISHI TOMOHIRO
TARUISHI TOMOHIRO
Application Number:
JP19797195A
Publication Date:
November 22, 1999
Filing Date:
July 12, 1995
Export Citation:
Assignee:
TOMOEGAWA SEISHIJO KK
International Classes:
C08K5/28; C08L77/00; C08L77/06; G03F7/037; H01L21/027; H01L21/302; H01L21/3065; (IPC1-7): C08L77/06; C08K5/28; G03F7/037; H01L21/027; H01L21/3065
Other References:
【文献】特許2627714(JP,B2)
Attorney, Agent or Firm:
Takeuchi Mamoru