Title:
【発明の名称】基板洗浄装置
Document Type and Number:
Japanese Patent JP2987132
Kind Code:
B2
Inventors:
HIRATSUKA YUTAKA
FUJIKAWA NOBUYUKI
FUJIKAWA NOBUYUKI
Application Number:
JP4713198A
Publication Date:
December 06, 1999
Filing Date:
February 27, 1998
Export Citation:
Assignee:
DAN KAGAKU KK
International Classes:
B08B3/12; H01L21/304; (IPC1-7): H01L21/304; B08B3/12
Domestic Patent References:
| JP7328573A | ||||
| JP9321010A |
Attorney, Agent or Firm:
Junnosuke Nakamura (2 outside)