Title:
【発明の名称】走査型トンネル電子顕微鏡用原子間力顕微鏡の探針及び3-チエニル基含有珪素化合物
Document Type and Number:
Japanese Patent JP2992141
Kind Code:
B2
Abstract:
According to the invention, a probe for an atomic force microscope comprising a means for tunneling current is disclosed. The probe has a metal tip which is covered with a monomolecular film. The body of the probe is covered with a monomolecular laminated film, wherein conductive molecules are fixed on the the monomolecular film and/or the said monomolecular laminated film. The monomolecular laminated film has a closslinked electroconductive surface. The monomolecular laminated film is fixed on the metal by a covalent bond comprising a siloxane base (-SiO-), and the laminated part of the molecule is also chemically fixed on the metal surface by a covalent bond comprising a siloxane base (-SiO-). The probe of this invention is durable and can be put to practical use, because the films are surface conductive rather than conductive through its thickness. Moreover, compared with a conventional probe, since this probe does not metal deposited on the surface, it has high reproducibility with less process step to manufacture the probe.
Inventors:
NAKAGAWA TOORU
Application Number:
JP24797091A
Publication Date:
December 20, 1999
Filing Date:
September 26, 1991
Export Citation:
Assignee:
MATSUSHITA DENKI SANGYO KK
International Classes:
C09D183/04; G01B7/34; G01N27/00; G01N27/416; G01B21/30; G01Q60/04; G01Q60/10; G01Q60/16; G01Q60/24; G01Q60/38; G01Q60/40; G01Q70/14; (IPC1-7): G01B21/30; C07F7/12; C09D183/04; G01B7/34
Domestic Patent References:
| JP3118403A | ||||
| JP2225534A | ||||
| JP376714A | ||||
| JP335411U |
Attorney, Agent or Firm:
Hiroyuki Ikeuchi (1 person outside)