Title:
【発明の名称】荷電ビーム補正方法
Document Type and Number:
Japanese Patent JP3002246
Kind Code:
B2
Inventors:
Atsushi Miyagaki
Kiyoshi Hattori
Kiyoshi Hattori
Application Number:
JP24251290A
Publication Date:
January 24, 2000
Filing Date:
September 14, 1990
Export Citation:
Assignee:
Toshiba Corporation
International Classes:
H01L21/027; (IPC1-7): H01L21/027
Domestic Patent References:
| JP59161818A | ||||
| JP63237526A | ||||
| JP1147831A | ||||
| JP3188616A | ||||
| JP471219A | ||||
| JP3232217A |
Attorney, Agent or Firm:
Hideaki Togawa