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Title:
【発明の名称】シリコン溶融用坩堝
Document Type and Number:
Japanese Patent JP3011114
Kind Code:
B2
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Inventors:
Kaoru Takemura
Application Number:
JP252197A
Publication Date:
February 21, 2000
Filing Date:
January 10, 1997
Export Citation:
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Assignee:
SUMITOMO METAL INDUSTRIES,LTD.
International Classes:
C30B15/10; C30B29/06; H01L21/208; (IPC1-7): C30B29/06; C30B15/10
Domestic Patent References:
JP6476992A
JP632692A
JP2188490A
JP3290393A
JP6472985A
JP5330974A
JP5208890A
JP63274686A
Attorney, Agent or Firm:
Morio Mori (1 outside)



 
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