Title:
【発明の名称】ホローカソード放電を利用した加熱装置
Document Type and Number:
Japanese Patent JP3021536
Kind Code:
B2
Inventors:
Kazuya Saitoh
Hitoshi Kojima
Kazuhiro Watanabe
Hitoshi Kojima
Kazuhiro Watanabe
Application Number:
JP11509690A
Publication Date:
March 15, 2000
Filing Date:
May 02, 1990
Export Citation:
Assignee:
Nippon Vacuum Technology Co., Ltd.
International Classes:
C23C14/24; C23C14/32; H01J37/30; (IPC1-7): C23C14/32; H01J37/30
Domestic Patent References:
| JP1168860A |
Attorney, Agent or Firm:
Shigeru Yagita (3 outside)