Title:
【考案の名称】常圧化学蒸着用トレー
Document Type and Number:
Japanese Patent JP3022190
Kind Code:
U
More Like This:
Inventors:
Nogami Akatsuki
Hirokazu Tabata
Hirokazu Tabata
Application Number:
JP1060095U
Publication Date:
March 22, 1996
Filing Date:
August 30, 1995
Export Citation:
Assignee:
Toyo Tanso Co., Ltd.
International Classes:
(IPC1-7): C23C16/44; H01L21/205; H01L21/31
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