Title:
【発明の名称】ゲートアレイおよびその製造方法
Document Type and Number:
Japanese Patent JP3024195
Kind Code:
B2
Inventors:
▲高▼儀 光治
Application Number:
JP27705590A
Publication Date:
March 21, 2000
Filing Date:
October 15, 1990
Export Citation:
Assignee:
ソニー株式会社
International Classes:
H01L27/118; G11C11/401; H01L21/82; H01L27/10; H01L27/108; (IPC1-7): H01L27/118
Domestic Patent References:
| JP61248551A |
Attorney, Agent or Firm:
Kuninori Funabashi