Title:
【発明の名称】スパッタリングターゲットの加工方法
Document Type and Number:
Japanese Patent JP3026225
Kind Code:
B2
Inventors:
Michio Nagase
Yoshio Ito
Yoshio Ito
Application Number:
JP14128690A
Publication Date:
March 27, 2000
Filing Date:
June 01, 1990
Export Citation:
Assignee:
Vacuum Metallurgy Co., Ltd.
International Classes:
B23Q11/10; B24B55/02; C23C14/34; (IPC1-7): C23C14/34; B23Q11/10; B24B55/02
Domestic Patent References:
| JP4728588A | ||||
| JP5636A |
Attorney, Agent or Firm:
Kinichi Kitamura (3 others)