Title:
【発明の名称】溶液濃度自動管理装置および方法
Document Type and Number:
Japanese Patent JP3055707
Kind Code:
B2
Inventors:
Katsuhide Ohshima
Masahiro Ishikawa
Tadahiro Ito
Hidesato Igarashi
Masahiro Ishikawa
Tadahiro Ito
Hidesato Igarashi
Application Number:
JP6047491A
Publication Date:
June 26, 2000
Filing Date:
March 25, 1991
Export Citation:
Assignee:
Dipsole Co., Ltd.
International Classes:
C23C18/31; C25D21/14; G05D21/00; G05D21/02; (IPC1-7): G05D21/00; C23C18/31; C25D21/14; G05D21/02
Domestic Patent References:
| JP63140944A | ||||
| JP4839871A |
Attorney, Agent or Firm:
Minoru Nakamura (8 outside)