Title:
【発明の名称】炭化珪素コーティング材
Document Type and Number:
Japanese Patent JP3058601
Kind Code:
B2
Inventors:
Kichiya Tanino
Application Number:
JP183297A
Publication Date:
July 04, 2000
Filing Date:
January 09, 1997
Export Citation:
Assignee:
Nippon Pillar Industry Co., Ltd.
International Classes:
F16C3/02; C23C16/30; C23C16/32; C23C16/42; F16J15/34; H01L21/205; H01L21/314; H01L21/68; H01L21/683; (IPC1-7): C23C16/32; C23C16/42; H01L21/205; H01L21/314; H01L21/68
Domestic Patent References:
| JP3126671A | ||||
| JP4358068A |
Attorney, Agent or Firm:
Takeo Sugimoto