Title:
【発明の名称】ゲートアレイ方式の半導体集積回路装置
Document Type and Number:
Japanese Patent JP3065672
Kind Code:
B2
Inventors:
Kimihiro Ueda
Yasunobu Nakase
Yasunobu Nakase
Application Number:
JP229291A
Publication Date:
July 17, 2000
Filing Date:
January 11, 1991
Export Citation:
Assignee:
Mitsubishi Electric Corporation
International Classes:
H01L27/118; H01L21/82; H01L21/8238; H01L27/092; (IPC1-7): H01L27/118; H01L21/8238; H01L27/092
Domestic Patent References:
| JP6381946A | ||||
| JP63301545A |
Attorney, Agent or Firm:
Toshio Morita (3 outside)