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Title:
【考案の名称】ケミカルマシンポリッシャの研磨盤用研磨ドレッサ
Document Type and Number:
Japanese Patent JP3076540
Kind Code:
U
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Inventors:
Keiichi Fujimori
Junji Matsuo
Tadayuki Nishina
Application Number:
JP2000006897U
Publication Date:
April 06, 2001
Filing Date:
September 25, 2000
Export Citation:
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Assignee:
Fujimori Research Institute Co., Ltd.
International Classes:
(IPC1-7): B24B37/00; B24B53/00; H01L21/304
Attorney, Agent or Firm:
Fumio Sasashima (1 person outside)



 
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