Title:
【発明の名称】回転式塗布装置および回転式塗布方法
Document Type and Number:
Japanese Patent JP3086446
Kind Code:
B2
Inventors:
Masaaki Yamamoto
Application Number:
JP2563599A
Publication Date:
September 11, 2000
Filing Date:
February 03, 1999
Export Citation:
Assignee:
Dainippon Screen Mfg. Co., Ltd.
International Classes:
B05C11/08; G03F7/16; H01L21/027; H01L21/31; (IPC1-7): H01L21/027; B05C11/08; G03F7/16
Domestic Patent References:
| JP5169003A |