Title:
【発明の名称】成膜処理方法及び装置
Document Type and Number:
Japanese Patent JP3099801
Kind Code:
B2
Inventors:
Middle East Takahiro
Sou Kuwahara
Yo Doi
Rod double bozewell
Sou Kuwahara
Yo Doi
Rod double bozewell
Application Number:
JP8127598A
Publication Date:
October 16, 2000
Filing Date:
March 27, 1998
Export Citation:
Assignee:
Nissin Electric Co., Ltd.
International Classes:
C23C16/44; C23C16/455; C23C16/50; C23C16/505; H01L21/205; H01L21/31; (IPC1-7): C23C16/505; C23C16/455; H01L21/205; H01L21/31
Domestic Patent References:
| JP2112232A | ||||
| JP4154971A |
Attorney, Agent or Firm:
Masao Tanikawa