Title:
【発明の名称】シリコン加工廃水の処理方法
Document Type and Number:
Japanese Patent JP3102309
Kind Code:
B2
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Inventors:
Hisafuku Yamaguchi
Application Number:
JP18909895A
Publication Date:
October 23, 2000
Filing Date:
July 25, 1995
Export Citation:
Assignee:
Shin-Etsu Semiconductor Co., Ltd.
International Classes:
B01D21/01; C02F1/56; H01L21/301; H01L21/304; (IPC1-7): C02F1/56; B01D21/01; H01L21/301; H01L21/304
Domestic Patent References:
| JP384098A | ||||
| JP62247888A |
Attorney, Agent or Firm:
Ryoichi Yamamoto (1 person outside)